Mechanical Behavior of A MEMS Based Capacitive Energy Harvester

Mechanical Design of RF MEMS Capacitive Switches

 This paper analyses the mechanical behaviour of various suspensions of electrostatically actuated RF MEMS switches. A family of capacitive switches is described, with suspensions varying step by step from cantilevers to meander shaped double clamped beams. The result is a capacitive shunt switch with a designed actuation voltage of 4.5 V, and 20dB isolation and 0.04 dB insertion loss at a fre...

The Effect of Corrugations on Mechanical Sensitivity of Diaphragm for MEMS Capacitive Microphone

In this paper the effect of corrugated diaphragm on performance of MEMS microphone is described. The corrugated diaphragm is modeled in order to improve the sensitivity of micromachined silicon acoustic sensor. Analytical analyzes have been carried out to derive mathematic expressions for the mechanical sensitivity and displacement of corrugated diaphragm with residual stress. It is shown that ...

Strategies for Wideband Mechanical Energy Harvester

Mechanical Behavior of a FGM Capacitive Micro-Beam Subjected to a Heat Source

This paper presents mechanical behavior of a functionally graded (FG) cantilever micro-beam subjected to a nonlinear electrostatic pressure and thermal moment considering effects of material length scale parameters. Material properties through the beam thickness direction are graded. The top surface of the micro-beam is made of pure metal and the bottom surface from a mixture of metal and ceram...

A Review of MEMS Based Piezoelectric Energy Harvester for Low Frequency Applications

This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...